SFJ-231A helium mass spectrometer leak detector

Introduction

SFJ-231 helium leak detectors will be widely used in semiconductor process equipment maintenance, industrial gas detection and installation of systems, components in the assembly before the leak rate test and requires high pumping speed, high sensitivity and clean testing conditions of applications.

Features

Operation is very simple, usually only use two keys(leak detection key and Deflation key)

Imports multi-port molecular pump

Double filament automatically switch

Automatic zero

Automatic calibration

Automatic range switching

Technical parameters

smallest leak rate                                      5×10^-12Pa.·m³/s

Detection range                                        10^-3 ~10^-2 Pa.·m³/s

Maximum air inlet pressure                       1000Pa

Response time                                          <1s

Sniffing mode                                             1×10^-8 Pa.·m³/s

Ambient temperature                                 5°~35°C

Relative Humidity                                       <80%

Supply voltage                                           220v±10%,50Hz

Maximum operating current                         6A

Test port specifications                               DN25  ISO-KF

Dimensions                                                 W900×D560×H650

Weight                                                        72kg

Suction gun                                                 Standard 2.5m(According to customer requirements)